Nanoelectronic Device Processing
Tillverkning av nanokomponenter

EIT180F, 15 credits

Valid from: Spring 2019
Decided by: Professor Thomas Johansson
Date of establishment: 2018-12-21

General Information

Division: Electrical and Information Technology
Course type: Third-cycle course
Teaching language: English

Aim

The aim of the course is that the PhD student shall develop the skill to develop devices with highly competitive performance.

Goals

Knowledge and Understanding

For a passing grade the doctoral student must

• Demonstrate understanding of individual process steps
• Verify that process steps may be integrated in process chains
• Be able to interact with other students and researchers to solve process related issues

Competences and Skills

For a passing grade the doctoral student must

• Know how to operate a set of tools
• Be able to present a process flow in a structural way
• Fabricate devices with competing performance

Judgement and Approach

For a passing grade the doctoral student must

• Be able to identify process incompatibilities
• Be able to communicate processing technology to other researchers

Course Contents

The course consists of three different parts. First the student shall learn to use semiconductor process equipment required for fabrication of the specific device. Secondly, the student shall in a structural way develop the process flow to successfully fabricate the device. It shall be documented in the terms of power point process flows and the student shall continuously update the flow during process meetings.Finally, the process flow shall be documented.

Course Literature

Forskningsartiklar i ämnet..

Instruction Details

Types of instruction: Project, self-study literature review. Participation in weekly process meetings are required.

Examination Details

Examination formats: Written report, written assignments, seminars given by participants, miscellaneous. Part of the axamination will be the inclusion of process flows as appendices in the PhD thesis
Grading scale: Failed, pass
Examiner:

Admission Details

Further Information

Examinor Prof. Lars-Erik Wernersson

Course Occasion Information

Contact and Other Information

Course coordinators: