Crystal Growth and Semiconductor Epitaxy
Kristalltillväxt och halvledarepitaxi

FAFN15F, 7.5 högskolepoäng

Gäller från och med: Autumn 2014
Beslutad av: FN1/Anders Gustafsson
Datum för fastställande: 2014-04-22

Allmänna uppgifter

Avdelning: Solid State Physics
Kurstyp: Gemensam kurs, avancerad nivå och forskarnivå
Kursen ges även på avancerad nivå med kurskod: FAFN15
Undervisningsspråk: English

Syfte

Epitaxy is a method to fabricate crystalline materials, which is very common in the electronics industry. The aim of the course is to give the doctoral student a background that is relevant to research in crystal growth and epitaxy and to provide the knowledge necessary to discuss problems in crystal growth and epitaxy.

Mål

Kunskap och förståelse

För godkänd kurs skall doktoranden

• be able to explain crystal growth and epitaxy and the necessary concepts in thermodynamics and kinetics
• be able to explain the connection between growth parameters and the quality and properties of the grown material

Färdighet och förmåga

För godkänd kurs skall doktoranden

• be able to evaluate and select a crystal growth method, suitable for a specific situation
• be able to scientifically present issues related to crystal growth, orally or in writing

Kursinnehåll

In this course we will carefully treat the fundamental aspects of crystal growth. We will study the thermodynamic prerequisites for crystal growth, such as chemical potential, construction of binary phase diagrams, supersaturation, and nucleation. Further on, we will discuss surface energies, surface diffusion, and Wulff’s theorem. In the course section on epitaxial growth we will discuss surface reconstructions, lattice mismatch, and dislocations, as well as characterization – both in- and ex-situ. We will also deal with growth techniques and reactor models. During the course, the various moments will be illuminated by examples from modern research, especially research on epitaxy of nanostructures.

Kurslitteratur

Pohl, U.: Epitaxy of Semiconductors. Springer, 2013. ISBN 9783642329692.

Kursens undervisningsformer

Undervisningsformer: Föreläsningar, övningar

Kursens examination

Examinationsform: Skriftlig tentamen
Betygsskala: Underkänd, godkänd
Examinator:

Antagningsuppgifter

Förutsatta förkunskaper: FFF110 Processing and Device Technology, a basic course in thermodynamics and materials science.

Kurstillfällesinformation

Kontaktinformation och övrigt

Kursansvariga:
Hemsida: http://www.ftf.lth.se/education/elective_courses/