Kursplan för

Metal Organic Vapor Phase Epitaxy
Metallorganisk gasfasepitaxi

FFF025F, 7.5 högskolepoäng

Gäller från och med: Autumn 2019
Beslutad av: Anders Gustafsson FTF-AGU
Datum för fastställande: 2019-05-26

Allmänna uppgifter

Avdelning: Solid State Physics
Kurstyp: Ren forskarutbildningskurs
Undervisningsspråk: English

Syfte

The course aims at providing the necessary knowledge for understanding metallic gas phase epitaxis of semiconductor structures with respect to thermodynamic and kinetic aspects as well as detailed insight into commonly used material systems and their various challenges with regard to synthesis in practice and theory.

Mål

Kunskap och förståelse

För godkänd kurs skall doktoranden

Färdighet och förmåga

För godkänd kurs skall doktoranden

Kursinnehåll

Overview of the general MOVPE process. Thermodynamic aspects. Surface processes. Precursor molecules. Kinetics. Hydrodynamics and mass transport. Design of the MOVPE process. Specific materials. Superlattices. Active structures grown with MOVPE. Strain induced spontaneous nucleation (low-dimensional materials).

Kurslitteratur

Stringfellow, G.: Organometallic Vapor-Phase Epitaxy: Theory and Practice. Academic press, 1999. ISBN 0126738424.

Kursens undervisningsformer

Undervisningsformer: Seminarier, projekt

Kursens examination

Examinationsformer: Skriftlig rapport, seminarieföredrag av deltagarna, övrigt. The students prepare one to two assigned chapters in Stringfellow's book "Organometallic vapor phase epitaxy, theory and practice" as oral introduction presentation for each meeting occasion. Continuous examination is done by the students via the presentation and the following discussion where all students are expected to participate and prepare themselves by reading indicated chapters in the book and according to the syllabus referenced scientific literature. Two hours are devoted to reviewing and discussing each meeting occasion. There is a requirement for a prepared discussion point from each student and meeting occasion. The course concludes with a written examination where a scientific article or lecture is discussed and analyzed in terms of MOVPE and insights based thereon. Level: scientific publication.
Betygsskala: Underkänd, godkänd
Examinator:

Antagningsuppgifter

Förkunskapskrav: Some basic course in thermodynamics and material science. MOVPE experience.
Förutsatta förkunskaper: MSc in physics, chemistry or equivalent.
Urvalskriterier: Max 7 participants selected based on actual MOVPE usage.

Övrig information

The maximum number of students per course round with sufficient demand is 7. The course is typically given every five years.

Kurstillfällesinformation

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