Gäller från och med: Spring 2022
Beslutad av: Anders Gustafsson, ftf-agu (FUN)
Datum för fastställande: 2024-04-29
Avdelning: Solid State Physics
Kurstyp: Gemensam kurs, avancerad nivå och forskarnivå
Kursen ges även på avancerad nivå med kurskoder: FFFN01, FYST60
Undervisningsspråk: English
The aim of the course is to give deep practical and theoretical knowledge of fabrication and characterisation of semiconductor nanostructures, which can be used in nanoelectronics, nanophotonics and life sciencies. Since the course is project-oriented, there will be a limited number of introduction lectures, instead the students will participate in the labs and in an extensive project work. Theoretical part of the course will be covered by self-studies using the course literature and a selection of recently published review articles. The course will focus on different material processing techniques, which are used today in nanotechnology, for example, electron beam lithography (EBL), focused ion beams (FIB), nanoimprint lithography (NIL), reactive ion etching (RIE) etc. The laboratory excercises are aimed at giving a practical "hands-on" knowledge of a safe work in a research-grade cleanroom and some important technological methods used in semiconductor nanotechnology, such as EBL, NIL, scanning electron microscopy (SEM) and others. After the lab and safety training the students will get access to the Lund Nano Lab cleanrooms under the supervision of PhD-students and/or the lab staff, to take part in a research project work to learn practical details of nanofabrication and characterisation.
Kunskap och förståelse
För godkänd kurs skall doktoranden
Färdighet och förmåga
För godkänd kurs skall doktoranden
Värderingsförmåga och förhållningssätt
För godkänd kurs skall doktoranden realise the importance of correct combination of technological processing steps for successful fabrication and characterization of nanostructures in a cleanroom environment
The introductory lectures will review different methods of nanofabrication such as electron beam lithography, focused ion beams, nanoimprint, self-assembly, soft lithography, dry etching and others. The aim of the lectures is to introduce students to the subject of advanced nanofabrication and to guide them how to organize self-studies in an efficient way. The number of lectures is limited to 4 (totally 8 hours) and some time will be reserved at the lectures to discuss the material and to obtain the feedback from the students. The material for self-studies will be distributed among the students, it will include the recommended textbooks and a selection of suitable scientific review articles with a deeper coverage of the subject. Prior to the laboratory exercises a special cleanroom and safety training will be organized for the students to provide them with a special knowledge about the correct behavior in the research cleanrooms of Lund Nano Lab and how to deal with chemicals and equipment in the lab. The laboratory exercises will be divided into three parts (cleanroom behavior and practical handling of samples and chemicals, nanoimprint and scanning electron microscopy and electron beam lithography) to give the students some essential "hands-on" knowledge of the safe work habits in the Lund Nano Lab. These exercises will be performed in smaller groups (maximum 3 persons per groups) in order to be able to learn practical things efficiently. As a final and the biggest part of the course, course projects will be offered in order to deepen practical knowledge of the cleanroom work and learn the advanced equipment and nanofabrication techniques. The course project will take 4-6 weeks and will focus on a specific research area, relevant to the research activity of the Division of Solid State Physics. Totally 3-4 course projects will be offered during the course. The actual duration of the projects will depend on their complexity and the required cleanroom use and will be adjusted accordingly. The project work will be supervised by PhD-students and/or the staff of the Lund Nano Lab. Regular communication and discussions with the students about the project work will be organized in order to monitor the project implementation. At the end of the project a public mini-conference and project reports will summarise practical scientific and technological outcome of the course.
Whyte, W.: Cleanroom Technology.
Additional literature will be distributed during the course.
Undervisningsformer: Föreläsningar, laborationer, projekt, litteraturkurs som självstudier
Examinationsformer: Skriftlig tentamen, skriftlig rapport, seminarieföredrag av deltagarna
Betygsskala: Underkänd, godkänd
Examinator:
Förutsatta förkunskaper: FFFF10 Processing and Device Technology, or equivalent
Kursansvariga: