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Third-Cycle Courses

Faculty of Engineering | Lund University

Details for the Course Syllabus for Course FAFN15F valid from Autumn 2014

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General
Aim
  • Epitaxy is a method to fabricate crystalline materials, which is very common in the electronics industry. The aim of the course is to give the doctoral student a background that is relevant to research in crystal growth and epitaxy and to provide the knowledge necessary to discuss problems in crystal growth and epitaxy.
Contents
  • In this course we will carefully treat the fundamental aspects of crystal growth. We will study the thermodynamic prerequisites for crystal growth, such as chemical potential, construction of binary phase diagrams, supersaturation, and nucleation. Further on, we will discuss surface energies, surface diffusion, and Wulff’s theorem. In the course section on epitaxial growth we will discuss surface reconstructions, lattice mismatch, and dislocations, as well as characterization – both in- and ex-situ. We will also deal with growth techniques and reactor models. During the course, the various moments will be illuminated by examples from modern research, especially research on epitaxy of nanostructures.
Knowledge and Understanding
  • For a passing grade the doctoral student must
  • be able to explain crystal growth and epitaxy and the necessary concepts in thermodynamics and kinetics
    be able to explain the connection between growth parameters and the quality and properties of the grown material
Competences and Skills
  • For a passing grade the doctoral student must
  • be able to evaluate and select a crystal growth method, suitable for a specific situation
    be able to scientifically present issues related to crystal growth, orally or in writing
Judgement and Approach
  • For a passing grade the doctoral student must
Types of Instruction
  • Lectures
  • Exercises
Examination Formats
  • Written exam
  • Failed, pass
Admission Requirements
Assumed Prior Knowledge
  • FFF110 Processing and Device Technology, a basic course in thermodynamics and materials science.
Selection Criteria
Literature
  • Pohl, U.: Epitaxy of Semiconductors. Springer, 2013. ISBN 9783642329692.
Further Information
Course code
  • FAFN15F
Administrative Information
  •  -04-22
  • FN1/Anders Gustafsson

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