Course Syllabus for

Crystal Growth and Semiconductor Epitaxy
Kristalltillväxt och halvledarepitaxi

FAFN15F, 7.5 credits

Valid from: Autumn 2014
Decided by: FN1/Anders Gustafsson
Date of establishment: 2014-04-22

General Information

Division: Solid State Physics
Course type: Course given jointly for second and third cycle
The course is also given at second-cycle level with course code: FAFN15
Teaching language: English


Epitaxy is a method to fabricate crystalline materials, which is very common in the electronics industry. The aim of the course is to give the doctoral student a background that is relevant to research in crystal growth and epitaxy and to provide the knowledge necessary to discuss problems in crystal growth and epitaxy.


Knowledge and Understanding

For a passing grade the doctoral student must

Competences and Skills

For a passing grade the doctoral student must

Course Contents

In this course we will carefully treat the fundamental aspects of crystal growth. We will study the thermodynamic prerequisites for crystal growth, such as chemical potential, construction of binary phase diagrams, supersaturation, and nucleation. Further on, we will discuss surface energies, surface diffusion, and Wulff’s theorem. In the course section on epitaxial growth we will discuss surface reconstructions, lattice mismatch, and dislocations, as well as characterization – both in- and ex-situ. We will also deal with growth techniques and reactor models. During the course, the various moments will be illuminated by examples from modern research, especially research on epitaxy of nanostructures.

Course Literature

Pohl, U.: Epitaxy of Semiconductors. Springer, 2013. ISBN 9783642329692.

Instruction Details

Types of instruction: Lectures, exercises

Examination Details

Examination format: Written exam
Grading scale: Failed, pass

Admission Details

Assumed prior knowledge: FFF110 Processing and Device Technology, a basic course in thermodynamics and materials science.

Course Occasion Information

Contact and Other Information

Course coordinators:
Web page:

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