Course Syllabus for

Metal Organic Vapor Phase Epitaxy
Metallorganisk gasfasepitaxi

FFF025F, 7.5 credits

Valid from: Autumn 2019
Decided by: Anders Gustafsson FTF-AGU
Date of establishment: 2019-05-26

General Information

Division: Solid State Physics
Course type: Third-cycle course
Teaching language: English


The course aims at providing the necessary knowledge for understanding metallic gas phase epitaxis of semiconductor structures with respect to thermodynamic and kinetic aspects as well as detailed insight into commonly used material systems and their various challenges with regard to synthesis in practice and theory.


Knowledge and Understanding

For a passing grade the doctoral student must

Competences and Skills

For a passing grade the doctoral student must

Course Contents

Overview of the general MOVPE process. Thermodynamic aspects. Surface processes. Precursor molecules. Kinetics. Hydrodynamics and mass transport. Design of the MOVPE process. Specific materials. Superlattices. Active structures grown with MOVPE. Strain induced spontaneous nucleation (low-dimensional materials).

Course Literature

Stringfellow, G.: Organometallic Vapor-Phase Epitaxy: Theory and Practice. Academic press, 1999. ISBN 0126738424.

Instruction Details

Types of instruction: Seminars, project

Examination Details

Examination formats: Written report, seminars given by participants, miscellaneous. The students prepare one to two assigned chapters in Stringfellow's book "Organometallic vapor phase epitaxy, theory and practice" as oral introduction presentation for each meeting occasion. Continuous examination is done by the students via the presentation and the following discussion where all students are expected to participate and prepare themselves by reading indicated chapters in the book and according to the syllabus referenced scientific literature. Two hours are devoted to reviewing and discussing each meeting occasion. There is a requirement for a prepared discussion point from each student and meeting occasion. The course concludes with a written examination where a scientific article or lecture is discussed and analyzed in terms of MOVPE and insights based thereon. Level: scientific publication.
Grading scale: Failed, pass

Admission Details

Admission requirements: Some basic course in thermodynamics and material science. MOVPE experience.
Assumed prior knowledge: MSc in physics, chemistry or equivalent.
Selection criteria: Max 7 participants selected based on actual MOVPE usage.

Further Information

The maximum number of students per course round with sufficient demand is 7. The course is typically given every five years.

Course Occasion Information

Contact and Other Information

Course coordinators:

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